Scanning Electron Microscopy: Physics of Image Formation and Microanalysis

by Ludwig Reimer (Author)

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Format: Hardcover

Synopsis of Scanning Electron Microscopy: Physics of Image Formation and Microanalysis

Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.

Product details

  • Pages: 544
  • Publisher: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
  • Published: 17th September 1998
  • Language: English
  • ISBN: 9783540639763
  • Category: Science

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